Characterization of deep UV photoresist properties by infrared near-field scanning optical microscopy and related methods

Category

Appears in:

(2003)

Date accepted:

07.07.2003

Date Issued:

2003

URN:

urn:nbn:de:gbv:104-opus-353

PPN:

386228876

Language:

English

Type of Resource:

Text

Extent:

Online-Ressource (127 S. = 5579 KB)

Keywords:

Online-Publikation; Experimentalphysik; Nanotechnologie

DDC subject of DNB:

530 Physics

URL:

http://edok01.tib.uni-hannover.de/edoks/e01dd01/386228876.pdf

Dissertation note:

Auch als Buch-Ausg. erschienen